A1 A2 A3 A4 A5 A6 A7 A8 A9 B1 B2 B4 B5 B7 B8

A4: Process control in micro atmospheric pressure RF plasma jets by voltage waveform tailoring and customised boundary surfaces

Principal Investiagtors: J. Schulze, T. Mussenbrock


Mussenbrock, Thomas
(Principal Investigator)

Schulze, Julian
(Principal Investigator)

Bischoff, Lena

Korolov, Ihor

Liu, Yue

Hübner, Gerrit


ImageAtmospheric pressure radio frequency microplasma jets (RF m-APPJ) are frequently used as an efficient source of reactive species at low temperature for a variety of applications ranging from wound healing and sterilization to semiconductor manufacturing. In this project, a combined experimental and computational Approach is used to explore the potential of i) voltage waveform tailoring (VWT) and ii) specifically designed boundary surfaces to customize the electron heating dynamics on a ns-timescale in RF m-APPJs in order to control and optimize the generation of excited neutrals and reactive radicals. In the experiment, the m-APPJ will primarily be operated in helium with variable admixture of O2 and N2. The effect of using argon instead of helium and of admixing small amounts of CO2 (in collaboration with A3) will be studied. Phase Resolved Optical Emission Spectroscopy (PROES), electrical probes, Two Photon Absorption Laser Induced Fluorescence (TALIF), and tunable diode-laser absorption spectroscopy (TDLAS) will be used to study the electron heating dynamics, measure current/voltage, the atomic oxygen density, and the He(23S1) metastable density space resolved between the electrodes. In collaboration with A3 the vibrational excitation of selected molecules will be investigated experimentally. The experiments will be complemented by a hybrid simulation approach, which tracks electrons kinetically in a Particle-In-Cell scheme (PIC) and treats all heavy particles based on a fluid Dynamics approach (FD), to provide the basis for a fundamental understanding of the experimental results. Measurements and simulations will be performed under identical conditions as a function of the shape and amplitude of the driving voltage waveform, O2/N2 admixture, electrode materials (including catalytic coatings), and electrode topologies. A4 will reveal the basic physics of m-APPJs driven by tailored voltage waveforms and operated based on customized electrodes. It will develop fundamental concepts to optimize several applications of this plasma source that are studied in other projects of the CRC 1316 (e.g. B2, B3).



  • Lena Bischoff
    Optische Emissionsspektroskopie an einem RF kapaazitiv gekoppelten AP Plasma Jet unter Variation der Sauerstoffbeimischung (BA) - 08/2018
  • Gerrit Hübner
    Optische Emissionsspektroskopie an einem RF kapaazitiv gekoppelten AP Plasma Jet unter Variation der Stickstoffbeimischung (BA) - 08/2018

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