A4: Process control in micro atmospheric pressure RF plasma jets by voltage waveform tailoring and customised boundary surfaces

Principal Investigators: J. Schulze, T. Mussenbrock

Team

Mussenbrock, Thomas (Principal Investigator)

Schulze, Julian (Principal Investigator)

Bischoff, Lena (Master)

Vass, Mate (PhD)

Schulenberg, David (PhD)

Description

Based on experiments and simulations, the species transport in the COST reference plasma jet will be studied from the gas inlet through the active plasma region into the effluent in the presence of Voltage Waveform Tailoring (VWT) and customised boundary surfaces (materials + topology). The buildup of different neutral species along the direction of the gas flow will be quantified and understood as a basis for advanced plasma source design. Moreover, the plasma jet design will be modified by introducing a mesh into one of the electrodes and closing the original nozzle to make use of the unique features of VWT and structured electrodes to enhance the flux of selected neutral species into the effluent through the gridded electrode. Finally, the unique potential of VWT to tailor the Electron Energy Probability Function (EEPF) in combination with the new plasma source design will be used to enhance the synthesis of NH3 via cold non-equilibrium plasma catalysis by selectively exciting and dissociating nitrogen by electron impact.

Publications

• The effects of catalyst conductivity and loading of dielectric surface structures on plasma dynamics in patterned dielectric barrier discharges
  Constantin Neuroth, Zaka-ul-islam Mujahid, Birk Berger, Christian Oberste-Beulmann, Timothy Oppotsch, Quan-Zhi Zhang, Martin Muhler, Thomas Mussenbrock, Ihor Korolov and Julian Schulze
  Plasma Sources Sci. Technol. 32, 105019 (2023)
• Local enhancement of electron heating and neutral species generation in radio-frequency micro-atmospheric pressure plasma jets: the effects of structured electrode topologies
  Yue Liu, Máté Vass, Gerrit Hübner, David Schulenberg, Torben Hemke, Lena Bischoff, Sascha Chur, David Steuer, Judith Golda, Marc Böke
  Plasma Sources Sci. Technol. 32 025012 (2023)
• The effects of the driving frequencies on micro atmospheric pressure He/N₂ plasma jets driven by tailored voltage waveforms
  G. Hübner, L. Bischoff, I. Korolov, Z. Donkó, M. Leimkühler, Y. Liu, M. Böke, V. Schulz-von der Gathen, T. Mussenbrock, J. Schulze
  J. Phys. D: Appl. Phys. 55, 095204 (2022)
• Computational study of simultaneous positive and negative streamer propagation in a twin surface dielectric barrier discharge via 2D PIC simulations
  Q.Z. Zhang, R.T. Nugyen-Smith, F. Beckfeld, Y. Liu, T. Mussenbrock, P. Awakowicz, J. Schulze
  Plasma Sources Sci. Technol. 30, 075017 (2021)
• Electron power absorption in micro atmospheric pressure plasma jets driven by tailored voltage waveforms in He/N₂
  M. Vass, S. Wilczek, J. Schulze, Z. Donko
  Plasma Sources Sci. Technol. 30, 105010 (2021)
• Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N₂mixtures
  I. Korolov, Z. Donko, G. Hübner, Y. Liu, T. Mussenbrock, J. Schulze
  Plasma Sources Sci. Technol. 30, 095013 (2021)
• A zero-dimensional model of atmospheric-pressure plasma jet in binary and ternary mixtures of oxygen and nitrogen with helium background
  Y. He, P. Preissing, D. Steuer, M. Klich, V. Schulz-von der Gathen, M. Böke, I. Korolov, J. Schulze, V. Guerra, R. P. Brinkmann, E. Kemaneci
  Plasma Sources Sci. Technol. 30, 105017 (2021)
• Electron heating mode transitions in radio-frequency driven micro atmospheric pressure plasma jets in He/O₂: A fluid dynamics approach
  Y Liu, I Korolov, T Hemke, L Bischoff, G Hübner, J Schulze, T Mussenbrock
  J. Phys. D 54 (27), 275204 (2021)
• 2d spatially resolved O atom density profiles in an atmospheric pressure plasma jet: from the active plasma volume to the effluent
  D. Steuer, I. Korolov, S. Chur, J. Schulze, V. Schulz-von der Gathen, J. Golda, M. Böke
  J. Phys. D: Appl. Phys. 54, 355204 (2021)
• Electron transport parameters in CO₂: a comparison of two experimental systems and measured data
  M. Vass, E. Egüz, A. Chachereau, P. Hartmann, I. Korolov, A. Hösl, D. Bošnjaković, S. Dujko, Z. Donkó, C. Franck
  J. Phys. D: Appl. Phys. 54 035202 (2021)
• Atomic oxygen generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures
  I. Korolov, D. Steuer, L. Bischoff, G. Hübner, Y. Liu, V. Schulz-von der Gathen, M. Böke, T. Mussenbrock, J. Schulze
  J. Phys. D: Appl. Phys. 54, 125203 (2021)
• Micro atmospheric pressure plasma jets excited in He/O₂ by voltage waveform tailoring: A study based on a numerical hybrid model and experiments
  Y. Liu, I. Korolov, J. Trieschmann, D. Steuer, V. Schulz-von der Gathen, M. Böke, L. Bischoff, G. Hübner, J. Schulze, T. Mussenbrock
  Plasma Source. Sci. Technol. 30, 064001 (2021)
• 3-dimensional density distributions of NO in the effluent of the COST Reference MicroplasmaJet operated in He/N₂/O₂ admixture
  P. Preissing, I. Korolov, J. Schulze, V. Schulz-von der Gathen, M. Böke
  Plasma Sources Sci. Technol. 29, 125001 (2020)
• Electron swarms parameters in C₂H₂, C₂H₄ and C₂H₆: measurements and kinetic calculations
  Z. Donkó, P. Hartmann, I. Korolov, V. Jeges, D. Bošnjaković, S. Dujko
  Plasma Sources Sci. Technol. 29, 045009 (2020)
• Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N₂
  I. Korolov, M. Leimkühler, M. Böke, J. Schulze, Z. Donkó, T. Lafleur, S. Wilczek, R.P. Brinkmann V. Schulz-von der Gathen, L. Bischoff, G. Hübner, P. Hartmann, T. Gans, Y. Liu, T. Mussenbrock, J. Schulze
  J. Phys. D: Appl. Phys. 53 (2020) 185201
• Experimental observation and simulation of the equilibration of electron swarms in a scanning drift tube
  Z. Donkó, P. Hartmann, I. Korolov, V. Jeges, D. Bošnjaković, S. Dujkovic
  Plasma Sources Sci. Technol. 28, 095007 (2019)
• Control of electron dynamics, radical and metastable species generation in atmospheric pressure RF plasma jets by Voltage Waveform Tailoring
  I. Korolov, Z. Donkó, G. Hübner, L. Bischoff, P. Hartmann, T. Gans, Y. Liu, T. Mussenbrock, J. Schulze
  Plasma Sources Sci. Technol. 28, 094001 (2019)
• Disrupting the spatio-temporal symmetry of the electron dynamics in atmospheric pressure plasmas by voltage waveform tailoring
  A. Gibson, Z. Donkó, L. Alelyani, L. Bischoff, G. Hübner, J. Bredin, S. Doyle, I. Korolov, K. Niemo, T. Mussenbrock, P. Hartmann, J. Dedrick, J. Schulze, T. Gans, D. O'Connell
  Plasma Sources Sci. Technol. 28, 01LT01 (2019)
• Spatio temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation
  J. Schulze, Z. Donkó, T. Lafleur, S. Wilczek, R.P. Brinkmann
  Plasma Sources Sci. Technol. 27, 055010 (2018)
• Experimental and computational investigations of electron dynamics in micro atmospheric pressure radio-frequency plasma jets operated in He/N₂ mixture
  L. Bischoff, G. Hübner, I. Korolov, Z. Donkó, P. Hartmann, T. Gans, J. Held, V. Schulz-von der Gathen, Y. Liu, T. Mussenbrock, J. Schulze
  Plasma Sources Sci. Technol. 27 (2018)125009

Thesis

• Lena Bischoff, Bachelor thesis - 08/2018
  Optische Emissionsspektroskopie an einem RF kapaazitiv gekoppelten AP Plasma Jet unter Variation der Sauerstoffbeimischung
• Gerrit Hübner, Bachelor thesis - 08/2018
  Optische Emissionsspektroskopie an einem RF kapaazitiv gekoppelten AP Plasma Jet unter Variation der Stickstoffbeimischung
• Lena Bischoff, Master thesis - 03/2021
  Investigation of the effects of customized electrodes on capacitively coupled radio frequency microplasma jets using emission spectroscopy and laser d
• Mate Vass, PhD thesis - ongoing
  
• David Schulenberg, PhD thesis - ongoing
  

Further reading